Semiconductor Flame-Fused Transparent Quartz Ingot
Category：
Products
Semiconductor
Key words：
Quartz tube
Quartz sand
Quartz tube
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Product Description
Product Features
Ultra-high purity, minimal bubbles and excellent optical transmittance.
Product Category
Manufactured via oxy-hydrogen flame fusion. Featuring high purity, low alkali metal content, superior temperature resistance and good transparency. It serves as a high-quality fundamental quartz material, mainly applied to etching and other processes in semiconductor manufacturing.
Impurity content
| Products | Standard | Impurity content（PPM) | |||||||||||||||||
| Al | B | Ca | Co | Cu | Fe | K | Li | Mg | Mn | Na | Ni | Ti | Zr | Cr | P | Zn | OH | ||
| VQD112 | normal value | 6.00 | 0.06 | 0.40 | 0.07 | 0.01 | 0.40 | 0.40 | 0.04 | 0.05 | 0.05 | 0.30 | 0.02 | 0.70 | 0.03 | 0.01 | 0.03 | 0.03 | -150 |
| max value | 14.00 | 0.08 | 0.70 | 0.10 | 0.03 | 1.00 | 0.80 | 0.10 | 0.15 | 0.10 | 1.00 | 0.05 | 1.00 | 0.10 | 0.05 | 0.05 | 0.05 | -150 | |
| VQD113 | normal value | 6.00 | 0.10 | 1.00 | 0.07 | 0.03 | 1.00 | 1.00 | 0.80 | 0.20 | 0.05 | 0.80 | 0.02 | 1.50 | 1.00 | 0.03 | 0.05 | 0.03 | -200 |
| min value | 20.00 | 0.20 | 1.50 | 1.00 | 0.05 | 1.20 | 1.40 | 1.00 | 0.50 | 0.10 | 1.50 | 0.10 | 1.70 | 1.50 | 0.10 | 0.10 | 0.05 | -200 | |
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威克特瑞
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